FIXING DEVICE IMPLEMENTED ON PROBE APPARATUS ROBUST TO DISTORTION DUE TO HEAT

摘要

PURPOSE: A fixing device implemented on a probe apparatus is provided to improve a test reliability by rejecting a distortion force resulted from heat. CONSTITUTION: A probe card(11) includes a plurality of probes which are to be brought into an electrical and mechanical contact with a target object. The probes are configured to examine the electrical characteristics of the target object. The probe card is exposed to a high-temperature atmosphere. A support frame(12) is configured to support the probe card in its central portion. A plurality of first coupling members(16A) couple the probe card on the support frame to fix the probe card. A sustain frame is configured to hold the probe card and the support frame in its outer peripheral portions. The sustain frame is fixed to the probe. A plurality of second coupling members(16B) are provided to couple the holding frame on the support frame to fix the holding frame.