Verfahren zur Herstellung von Halbleiterscheiben,申请号DE19976023338T-传众专利搜索

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发明名称	Verfahren zur Herstellung von Halbleiterscheiben
摘要
申请公布号	DE69723338(T2)	申请公布日期	2004.05.06
申请号	DE19976023338T	申请日期	1997.03.25
申请人	SHIN-ETSU HANDOTAI CO., LTD.	发明人	KATO, TADAHIRO;MASUMURA, HISASHI;OKUNI, SADAYUKI;KUDO, HIDEO
分类号	B24B1/00;C30B33/00;H01L21/302;H01L21/304;H01L21/306;(IPC1-7):C30B33/00;H01L21/00	主分类号	B24B1/00
代理机构		代理人
主权项
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