PIEZOELECTRIC MICROMANIPULATOR WHICH IS ESPECIALLY INTENDED FOR MICROBOTICS AND METHOD OF IMPLEMENTING SAME

摘要

The invention relates to a micromanipulator comprising at least one finger (11) which is made from a piezoelectric material and which is equipped with electrodes (2). Moreover, one free end (110) of the aforementioned finger can be deflected along two mutually orthogonal axes (Y, Z) by applying a suitable configuration of electric potentials to the electrodes. According to the invention, the finger (11) is formed through the alternate stacking of an even number of piezoelectric plates (30) and electrodes (211, 212) which are reciprocally connected both mechanically and electrically, said stack being formed on either side of a central electric potential surface (20) which serves as a reference electrode. The structure of the inventive micromanipulator is such that it can be made using techniques which are immediately accessible to persons skilled in the art.