| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the electric power of an optical deflector for deflecting a laser beam etc. <P>SOLUTION: When a mirror body 11 formed with a pair of beam parts 11b and 11c and a mirror part 11d within an outer frame part 11a is attached on a mirror body stand 12, stationary electrodes 13A and 13B are attached along right and left slopes 12a and 12b formed on the mirror body stand 12 and the gap between the mirror part 11d in the mirror body and the stationary electrode 13A or the stationary electrode 13B is set small via an insulating layer 14, as a result, the state of attracting the mirror part 11 in the mirror body 11 along the inclined stationary electrode 13A or the stationary electrode 13B by an extremely small voltage can be maintained and the electric power of the optical deflector 10A can be reduced. <P>COPYRIGHT: (C)2004,JPO |
