| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve linearity from a low pressure to a high pressure in a relation between the internal pressure of a pressure detection chamber and the displacement quantity of a diaphragm, concerning a liquid-seal type pressure sensor formed by enclosing a liquid in the pressure detection chamber partitioned by the diaphragm having a corrugation. <P>SOLUTION: In the pressure detection chamber 40 as a recessed part formed in cases 10, 30, an oil 15 as the liquid is enclosed and a pressure detection element is provided. The discoid diaphragm 34 is provided in contact with the oil 15 so as to close the pressure detection chamber 40 in the case, and the diaphragm is fixed to the case at the circumferential part 34a. The diaphragm 34 is provided with the concentric corrugation 34c having a section of a curved shape. Assuming that the radius of the diaphragm 34 is R, the vertex of the corrugation 34c is positioned a little to the center point 34b of the diaphragm at a distance longer than 0.4R from the circumferential part 34a of the diaphragm. <P>COPYRIGHT: (C)2004,JPO</p> |
