| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle optical device hardly causing distortion, energy dispersion and astigmatism, and provided with a function of a beam splitter, and to provide an electron microscope and an electron lithography system wherein beam paths for passing electron beams are separated from one another. SOLUTION: A particle optical beam splitter provided with at least three beam operation regions formed for at least one particle beam passing the beam splitter and having magnetic fields different in intensity of the fields. This particle optical device comprises a plurality of sub-components for generating a magnetic field region for deflecting first and second beams in a suitable direction and at a suitable angle. First of all, the beam splitter never causes dispersion, astigmatism or distortion. COPYRIGHT: (C)2004,JPO
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