| 摘要 |
PROBLEM TO BE SOLVED: To process signal components contained in an input signal having markedly different background levels with high precision by using a suitable range. SOLUTION: The image processing method and apparatus can process a plurality of signal components contained in the input signal having significantly different background levels, and are suitable for use in a mark alignment device, used in a semiconductor manufacturing apparatus. Image processing is carried out by setting ranges Rm, Rw for each signal component 13, 17 respectively. COPYRIGHT: (C)2004,JPO
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