发明名称 Flash EEPROM unit cell and memory array architecture including the same
摘要 A high-density flash EEPROM (Electrically Erasable Programmable Read Only Memory) unit cell and a memory array architecture including the same are disclosed. The flash EEPROM unit cell comprises a substrate on which field oxide layers are formed for isolating unit cells, a floating gate dielectric layer formed between the adjacent field oxide layers, wherein the floating gate dielectric layer includes a first dielectric layer and a second dielectric layer which are connected in parallel between a source and a drain formed on the substrate, and the thickness of the first dielectric layer is thicker than the second dielectric layer, a floating gate formed on the floating gate dielectric layer, a control gate dielectric layer formed on the floating gate; and a control gate formed on the control gate dielectric layer.
申请公布号 US2004079972(A1) 申请公布日期 2004.04.29
申请号 US20030689722 申请日期 2003.10.22
申请人 TERRA SEMICONDUCTOR, INC. 发明人 YOON SUKYOON
分类号 H01L27/115;G11C16/00;H01L21/8247;H01L27/148;H01L29/788;(IPC1-7):H01L27/148 主分类号 H01L27/115
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