LOAD LOCK CHAMBER FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A load lock chamber for manufacturing a semiconductor device is provided to be capable of preventing an index from being damaged due to the reaction residues attached on a wafer. CONSTITUTION: A load lock chamber(100) for manufacturing a semiconductor device is provided with a housing(500) having a pump port at its one side and an index(400) installed at the other side of the housing for transferring a wafer cassette into the housing. At this time, the index is capable of moving up and down. The cassette has a leg part at its bottom surface. The index has a support part for supporting both end portions alone of the leg part in order to minimize the contact surface with the cassette. Preferably, the index is coated with TiN.