| 摘要 |
PROBLEM TO BE SOLVED: To provide a UV light spot irradiation and exposure device which improves exposure edge precision by preventing an exposure time from being extended accompanying variation in size of an irradiation spot. SOLUTION: An exposure device main body 1 is provided with a light guide 2 as a light source for UV light at the upper end of a lens frame main body 3 provided with a fixed lens 4, a frame 5 for zooming which is provided with a movable lens and has a projection hole 9 atop is fitted to the lens frame main body 3 to freely slide upward and downward by a zoom adjusting device 5', and the lens frame main body 3 is configured to freely move up and down about a lens fitting plate 8 by a focal length adjusting device 7. COPYRIGHT: (C)2004,JPO |
