| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high performance and inexpensive surface acoustic wave device which prevents loss increase (deterioration) caused by damage to the substrate of RIE used in IDT electrode working of a surface acoustic wave element. SOLUTION: A dummy pattern is formed in advance in the open area of an IDT electrode 4 on a piezoelectric substrate 1. The surface of the piezoelectric substrate 1 is prevented from being struck by active ions when the IDT electrode 4 is subjected to RIE working to eliminate the cause of crystal structure disturbance in an IDT electrode space part of the piezoelectric substrate 1. COPYRIGHT: (C)2004,JPO
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