摘要 |
PROBLEM TO BE SOLVED: To enhance a measurement method for measuring a temperature characteristic of a piezoelectric (crystal) raw substrate depending on its form. SOLUTION: In order to solve the task above, the method measures a frequency of the piezoelectric raw substrate that is sandwiched between electrode plates. The temperature characteristic measurement method is characterized in that a heating means and a cooling means change the temperature of the piezoelectric raw substrate without applying any modification to the substrate to confirm the temperature characteristic while measuring the frequency to solve the task. COPYRIGHT: (C)2004,JPO
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