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发明名称
TRANSPARENT OXIDE SEMICONDUCTOR THIN FILM TRANSISTORS
摘要
This invention relates to novel, transparent oxide semiconductor thin film transistors (TFT's) and a process for making them.
申请公布号
WO2004034449(A2)
申请公布日期
2004.04.22
申请号
WO2003US32439
申请日期
2003.10.10
申请人
E.I. DU PONT DE NEMOURS AND COMPANY;CARCIA, PETER, FRANCIS;MCLEAN, ROBERT, S.
发明人
CARCIA, PETER, FRANCIS;MCLEAN, ROBERT, S.
分类号
C23C14/08;H01L21/336;H01L21/363;H01L21/365;H01L29/786
主分类号
C23C14/08
代理机构
代理人
主权项
地址
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