| 摘要 |
PROBLEM TO BE SOLVED: To obtain a process for producing a nozzle plate in which shape machining precision of a basic material and a water repellent film is enhanced. SOLUTION: The process for producing a nozzle plate comprises a first machining step for boring ejection openings 10a through a basic material 1 on which a water repellent film 2 is formed by irradiating the opposite side of the basic material 1 with a laser beam using a first mask, and a second machining step for boring ejection openings 10b through the water repellent film 2 by irradiating the side of the basic material 1 where the water repellent film 2 is formed with a laser beam 31 using a second mask 21. COPYRIGHT: (C)2004,JPO
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