发明名称 IMAGE SENSOR CAPABLE OF PREVENTING CROSS-TALK AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: An image sensor and a manufacturing method thereof are provided to be capable of minimizing the cross-talk between neighboring pixels for considerably improving the performance and yield of the image sensor. CONSTITUTION: An image sensor is provided with a first conductive type substrate(20a) of high concentration, the first conductive type epitaxial layer(20b) formed on the first conductive type substrate of high concentration, and a photo diode formed from the surface of the epitaxial layer to the substrate region. At this time, the epitaxial layer has a thickness of 3-5 m. Preferably, the image sensor further includes an isolation layer(21) formed on the epitaxial layer for contacting one side of the photo diode and the first conductive type channel stop region(P+) formed from the lower portion of the isolation layer to the substrate region. The channel stop region has the same width as the isolation layer.
申请公布号 KR20040032542(A) 申请公布日期 2004.04.17
申请号 KR20020061733 申请日期 2002.10.10
申请人 HYNIX SEMICONDUCTOR INC. 发明人 HWANG, JUN
分类号 H01L27/14;(IPC1-7):H01L27/14 主分类号 H01L27/14
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