| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve a problem that a conventional piezoelectric micropump is provided with a complex backflow preventive mechanism for making fluid flow in one direction and thereby not suitable for carrying fluid at high speed and a long term use. <P>SOLUTION: The piezoelectric micropump is equipped with a partition wall having a plurality of electrodes made from piezoelectric materials aligned in parallel, and composed of a base plate using a space between the partition walls as a flow passage of fluid, and a sealing plate joined on the partition walls on the base plate and blocking the flow passage. A supply hole for inducing the fluid and supplying the fluid into each flow passage is provided on one end side of the flow passage, and a discharge hole joining and discharging the fluid from each flow passage is provided in the other end side thereof. Each of these electrodes is divided into three driving electrodes in a longitudinal direction of the partition wall. According to pressure change in the flow passage by the center driving electrode, pressure in the flow passage is changed by either one of the driving electrodes in both ends, thereby preventing backflow of the fluid. <P>COPYRIGHT: (C)2004,JPO</p> |
