| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a component which is used in a plasma processing apparatus and can prevent a thermally sprayed insulator film formed on the surface exposed with plasma from peeling off, and to provide a component for use in a plasma processing apparatus. <P>SOLUTION: A blasting material having a grain index of 60-100 is blown onto the plasma-exposable surface of a component for use in a plasma processing chamber of a plasma processing apparatus 10, the blast-treated plasma-exposable surface is immersed for 10-90 minutes in a 5-30% hydrofluoric acid solution for cleaning, and alumina is thermally sprayed onto the surface exposed to the plasma after immersion and cleaning. <P>COPYRIGHT: (C)2004,JPO |
