| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear motor capable of canceling side force generated at a movable coil. SOLUTION: In a linear motor, the movable coil 3 has a first and a second sides 31, 32 parallel to a Y-axis and a third and a fourth sides 33, 34 parallel to an X-axis orthogonally crossing the Y-axis. Permanent magnets 5, 5' which generate magnetic fields in a first direction (a) parallel to a Z-axis orthogonally crossing the X-axis and the Y-axis are made to face each other through the first side 31, and permanent magnets 7, 7' which generate magnetic fields in a second direction (b) opposite to the first direction Z(a), are made to face each other through a second side 32. Magnetic fields are generated in the first and the second directions (a) and (b) by the magnets 9, 9' to generate the force in the direction opposite to the side force at the third and the fourth sides 33, 34. By controlling the direction and magnitude of the magnetic field with the magnet, the side force can be canceled. COPYRIGHT: (C)2004,JPO
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