发明名称 |
Integrated circuit capacitors having a dielectric layer between a U-shaped lower electrode and a support layer |
摘要 |
Integrated circuit capacitors are provided having an electrically insulating electrode support layer having an opening therein on an integrated circuit substrate. A U-shaped lower electrode is provided in the opening and a first capacitor dielectric layer extends on an inner surface and an outer portion of the U-shaped lower electrode. A second capacitor dielectric layer extends between the outer portion of the U-shaped lower electrode and the first capacitor dielectric and also extends between the outer portion of the U-shaped lower electrode and an inner sidewall of the opening. An upper electrode extends on the first dielectric layer.
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申请公布号 |
US2004065938(A1) |
申请公布日期 |
2004.04.08 |
申请号 |
US20030665093 |
申请日期 |
2003.09.17 |
申请人 |
WON SEOK-JUN;YOO CHA-YOUNG |
发明人 |
WON SEOK-JUN;YOO CHA-YOUNG |
分类号 |
H01L27/04;H01L21/02;H01L21/8242;H01L27/108;(IPC1-7):H01L29/00 |
主分类号 |
H01L27/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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