| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a compact and lightweight gas supply unit easy in change of its arrangement. <P>SOLUTION: In this gas supply unit 10 which has fluid controllers 1-7, and piping blocks 11-18, and wherein the fluid controllers 1-7 are connected by mounting the fluid controllers 1-7 on upper faces of the piping blocks 1-18 to configurate a part of a gas supply line, a filter block 20 provided with a filter element 26 on a channel communicating the fluid controllers 1-7 and the piping blocks 11-15 is mounted between the fluid controllers 1-7 and the piping blocks 11-15. <P>COPYRIGHT: (C)2004,JPO</p> |
