发明名称 Verfahren zur Herstellung eines Stabes aus Halbleitermaterial
摘要 Pure silicon is deposited, e.g. from a gas, on to a rod of silicon containing a doping agent so as substantially to increase the cross-sectional area of the rod whereafter the rod is zone-melted, and optionally stretched. The process of deposition, zone-melting, and stretching may be repeated. The resistivity of the silicon may increase from 0,1 to 100 ohm-cm. p-doping agents specified are aluminium, boron, and gallium. n-doping agents specified are antimony, arsenic, and phosphorus. To effect doping, the rod may be rubbed with boron, or a filament of boron-containing glass applied thereto, and the rod then zone-melted.
申请公布号 DE1153540(B) 申请公布日期 1963.08.29
申请号 DE1958S059920 申请日期 1958.09.20
申请人 SIEMENS-SCHUCKERTWERKE AKTIENGESELLSCHAFT 发明人 HOFFMANN DR.-ING. ARNULF;KELLER DR. RER. NAT. WOLFGANG;REUSCHEL DR. PHIL. NAT. KONRAD;RUMMEL DR.-ING. HABIL. THEODOR
分类号 C30B13/04;C30B13/10;C30B25/00;D06M13/123;H01L21/00;H01L21/205 主分类号 C30B13/04
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