发明名称 Method and device for injecting a fixed quantity of liquid
摘要 The present invention is a method and apparatus for ejecting a very small amount of liquid at high speed and precisely independent of the viscosity of the liquid. This apparatus and method begins by applying pressure to the liquid prior to starting ejection of the liquid and/or holding a pressure near an ejection orifice after the end of liquid ejection at a predetermined specific value so that an ejection rate of the liquid through the ejection orifice is kept constant. This apparatus and method is able to control the liquid temperature and able to refill the liquid without entrapment of bubbles occurring.
申请公布号 US6715506(B1) 申请公布日期 2004.04.06
申请号 US20010868630 申请日期 2001.10.09
申请人 MUSASHI ENGINEERING, INC. 发明人 IKUSHIMA KAZUMASA
分类号 B05C5/02;B05C11/10;G01F11/02;G01F13/00;H01L51/40;(IPC1-7):B05D1/26;G01F17/00;H01L21/027 主分类号 B05C5/02
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