| 摘要 |
A positioning mark (21 to 24) is positioned and fixed with predetermined accuracy with respect to an image information detection unit (1, 2), and when the image information detection unit (1) having a narrow visual field can detect the positioning mark (21 to 24), position error of a workpiece (7) to be machined is determined based on the detected image information. On the other hand, when the image information detection unit (1) having the narrow visual field can not detect the positioning mark (21 to 24), the image information detection unit (2) having a wide visual field detects image information of the positioning mark (21 to 24), corrects a relative position between the image information detection unit (2) having the wide visual field and the workpiece (7) based on the position errors of the workpiece (7) obtained from the detected image information, and the image information detection unit (1) having the narrow visual field detects image information for the positioning mark (21 to 24) to determine position errors of the workpiece 7 based on the detected image information.
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