METHOD OF FABRICATING LiTaO3 SINGLE CRYSTALLINE SUBSTRATE FOR SURFACE ACOUSTIC WAVE DEVICE

摘要

PURPOSE: A method of fabricating a LiTaO3 single crystalline substrate for a surface acoustic wave substrate is provided to remove rapidly the static electricity due to a superconducting characteristic of LiTaO3 by reducing a time for reduction process and improving the electric conductivity. CONSTITUTION: A single polarization process for a LiTaO3 single crystalline substrate is performed. A reduction process for the LiTaO3 single crystalline substrate is performed by heating the single-polarized LiTaO3 single crystalline substrate below the Curie temperature under the environment where the reductive atmosphere and a state of vacuum atmosphere are exchanged periodically. A period of time under the reduction atmosphere is longer than a period of time under the state of vacuum.