| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method and apparatus for a phosphor sheet, suitably applied to controlling an evaporation rate of a thick film phosphor layer in manufacturing a phosphor sheet, and particularly controlling the evaporation rate for microcomponent in dual vapor deposition. SOLUTION: According to a manufacturing method for a phosphor sheet, a stimulable phosphor layer containing a phosphor and an activation agent is evaporated on a sheet-like substrate to deposit in a vacuum chamber. Excitation energy is applied to the evaporated deposition component, and emitted light from the deposition component vapor corresponding thereto is monitored to control the evaporation rate of the deposition component according to the monitoring result. COPYRIGHT: (C)2004,JPO
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