ELECTRIC FURNACE FOR BAKING ELECTRONIC COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide an electric furnace for baking an electronic component capable of supplying preheated atmosphere gas into the furnace uniformly and stably and eliminating unevenness of quality of the baked electronic component. SOLUTION: In this electric furnace for baking the electronic component by introducing atmosphere gas into the furnace, a gas injection part for introducing gas into a side wall part of the furnace is provided, and a cavity part for preheating the gas introduced into the furnace from the gas injection part is provided. COPYRIGHT: (C)2004,JPO