| 摘要 |
PROBLEM TO BE SOLVED: To provide a tremor device capable of holding its position independently of external force impressed after performing fine positional adjustment in the X-Y axis directions. SOLUTION: The tremor device 1 is provided with a supporting board 2 and a driving part 3 fixed on the supporting board 2. When the X-Y axis directions of a 2nd movable part 10 in the driving part 3 are finely adjusted, the inside of a hinge part 32 is floated from the supporting board 2 at the adjustment. After ending the adjustment, the driving part 3 is adhered to the supporting board 2 against the elasticity of the hinge part 32 by vacuuming a space between the supporting board 2 and the driving part 3 through a feeding/discharging port 27 or the like. Consequently the 2nd movable part 10 adjusted in the X-Y axis directions can be prevented from being deviated in the position by external force. COPYRIGHT: (C)2004,JPO |
