发明名称 |
Method for fabricating 3-D structures with smoothly-varying topographic features in photo-sensitive epoxy resists |
摘要 |
A method utilizing gray-tone exposure of a class of thick negative photo-sensitized epoxy resists from the substrate side of a transparent substrate and development methods that rely upon a physical distinction between polymerized (solid) and unpolymerized (liquid) photoresist at elevated temperatures may be used to fabricate 3-D structures in the photo-sensitized epoxy. Such structures may exhibit smoothly-varying topographic features with thicknesses as great as 2 mm.
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申请公布号 |
US2004063051(A1) |
申请公布日期 |
2004.04.01 |
申请号 |
US20030666198 |
申请日期 |
2003.09.17 |
申请人 |
AFROMOWITZ MARTIN A. |
发明人 |
AFROMOWITZ MARTIN A. |
分类号 |
G03F7/20;G03F7/38;G09B11/00;(IPC1-7):G03C5/18 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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