发明名称 |
METHOD OF MANUFACTURING A WAFER ASSEMBLY |
摘要 |
A method of manufacturing a wafer assembly comprising a chip wafer onto which a cover wafer is deposited, the chip wafer comprising an active face and an inactive face, the active face comprising chip elements, the cover wafer being provided with a chip-element-receiving cavity located above a chip element, comprises the following steps: - a cover-wafer-depositing step, in which a cover wafer is deposited on the active face so as to obtain a wafer assembly, the cover wafer being provided with a plurality of chip-receiving cavities, a chip-receiving cavity being located above a chip element, the cover wafer being made of an organic material; - a wafer assembly thinning step, in which the inactive face of the chip wafer is thinned; - an assembling step, in which a chip is placed in the cavity of the cover wafer stacked above the chip wafer. |
申请公布号 |
WO2004027867(A1) |
申请公布日期 |
2004.04.01 |
申请号 |
WO2003IB04012 |
申请日期 |
2003.09.17 |
申请人 |
SCHLUMBERGER SYSTEMES;SCHLUMBERGER MALCO INC.;LEIBENGUTH, JOSEPH;BONVALOT, BEATRICE;THEVENOT, BENOIT;LEMOULLEC, LAURENT;DEPOUTOT, FREDERIC;REIGNOUX, YVES |
发明人 |
LEIBENGUTH, JOSEPH;BONVALOT, BEATRICE;THEVENOT, BENOIT;LEMOULLEC, LAURENT;DEPOUTOT, FREDERIC;REIGNOUX, YVES |
分类号 |
G06K19/073;G06K19/077;H01L21/50;H01L23/498;H01L23/58;H01L25/18 |
主分类号 |
G06K19/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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