| 摘要 |
PURPOSE: A method for manufacturing a flexible micro electro mechanical system(MEMS) transducer is provided, which uses the flexible polymer substrate by making the transducer under a low temperature process. CONSTITUTION: A method for manufacturing a flexible micro electro mechanical system(MEMS) transducer includes the steps of: forming a sacrificial layer on the flexible substrate; stacking a membrane layer(220), a bottom electrode layer, an active layer, a top electrode layer on the sacrificial layer, subsequently; patterning the top electrode layer, the active layer and the bottom electrode layer, subsequently; stacking the second protection layer(260) to cover the top electrode layer, the bottom electrode layer and the active layer; patterning the connection pad layer so as to form a first connection pad(272) to connect with the bottom electrode layer and a second connection pad(271) to connect with the top electrode layer, after the second protection layer is patterned so as to connect the bottom electrode layer with the top electrode; and removing the sacrificial layer after the membrane layer is patterning until the sacrificial layer is exposed. |
