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发明名称
摘要
申请公布号
JP3514361(B2)
申请公布日期
2004.03.31
申请号
JP19980064511
申请日期
1998.02.27
申请人
发明人
分类号
H03H3/08;H01L23/31;H03H9/05;H03H9/25;(IPC1-7):H03H9/25
主分类号
H03H3/08
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