DEPOSITION APPARATUS FOR ORGANIC ELECTRO-LUMINESCENCE DISPLAY DEVICE

摘要

PURPOSE: A deposition apparatus for organic electro-luminescence display device is provided to prevent the generation of temperature gradient by maintaining an interval between a surface of a deposition material and a heating source regardless of the height of the deposition material. CONSTITUTION: A deposition apparatus for organic electro-luminescence display device includes a heating unit, a sensing unit(22), and a control unit. The heating unit is used for supplying the heat to a selected position of an evaporating source. The sensing unit(22) is used for sensing a variation of surface height of a deposition material located on the evaporating source. The control unit controls selectively an operation of the heating unit according to a signal of the sensing unit(22). The heating unit is formed with a plurality of coils(C1-Cn).