发明名称 Pressure processing device
摘要 A pressure processing device including a vessel having a body and an opening/closing member. A seal member is provided on a joining surface between the body and the opening/closing member, and a non-sliding joining surface is provided which is not slidably moved when the member is opened and closed. A device is provided including a diaphragm for housing an object to be processed, and a fluid introducing passage to the vessel provided so that a greater part of a fluid flowing into the vessel flows into the diaphragm. The diaphragm can be formed of heat insulating material, and a filter can be provided for removing particles installed on the side of the diaphragm into which a fluid flows. A plate having a labyrinth construction can be provided for trapping particles by parts on a surface thereof. A pressure processing device in which an object may be washed is also provided.
申请公布号 US6712081(B1) 申请公布日期 2004.03.30
申请号 US20000650812 申请日期 2000.08.30
申请人 KOBE STEEL, LTD. 发明人 UEHARA KATSUHIRO;SAKASHITA YOSHIHIKO;KANDA TAKESHI;NISHIMOTO TAKEO
分类号 H01L21/304;B08B7/00;H01L21/00;(IPC1-7):B08B3/00 主分类号 H01L21/304
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