Optical component thickness adjustment method, optical component, and position adjustment method for optical component

摘要

If after manufacture it is found that the thickness of a solid immersion lens is less than a target thickness value, an adjustment portion is adhered thereto by vapor deposition so as to reduce the amount of thickness deficiency. If the solid immersion lens is made of quartz glass, SiO2 is used as the material which is vapor deposited. If the thickness of the solid immersion lens is greater than the target value, then it is reduced by etching.