| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor element, having superior detection performance by optimizing the layer thickness relation between sensitive layers and electrodes, in a sensor for detecting and measuring oxidizing gases, and superior in adhesion between the electrodes and an insulating layer. SOLUTION: The gas sensor element is provided with a substrate 2; the insulating layer 3 formed at least in a part of the surface of the substrate 2; and an oxidizing gas sensitive part 4 formed on the surface of the insulating layer 3. The sensitive part 4 is provided with the electrodes 42, formed in the surface of the insulating layer and the sensitive layers 41 formed on the surface of the insulating layer and having a tin oxide as a main component. The electrode 42 is formed on the surface of the insulating layer and comprises both a lower layer 421 formed on the surface of the insulating layer and having at least one type from among Ti, Ta, or Ta<SB>2</SB>O<SB>5</SB>as the main component and an upper layer 422, formed in the upper surface of the lower layer 421 and having at least one type from among Pt, Au or Al as the main component. The ratio (x/y), between the the layer thickness (x) of the sensitive layer 41 and the layer thickness (y) of the electrode, is between 0.19-3.5. COPYRIGHT: (C)2004,JPO
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