| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal flowmeter of simple structure which can measure a flow rate with high precision without depending on difference between a temperature applied to a flow sensor and a temperature of fluid. <P>SOLUTION: The thermal flowmeter is provided with a thermal flow sensor equipped with a first and a second temperature detecting elements which are arranged in the flow direction of fluid interposing a heater element, a first temperature sensor for detecting a temperature of the fluid flowing in piping in which the sensors are included, and a second temperature sensor for detecting a temperature of the piping. A temperature difference correcting means is installed to correct a flow rate of the fluid detected by the thermal flow sensors, by referring a temperature difference correcting table according to the temperature difference between the temperature of the piping which is detected by the first and second temperature sensors and the temperature of the fluid passing in the piping. <P>COPYRIGHT: (C)2004,JPO</p> |
