发明名称 |
Component testing apparatus e.g. for circuit board inspection, detects fault in component based on diffuse field measured by elements comprising pairs of electrodes |
摘要 |
The apparatus includes a diffuse-field element (51,71) for generating and/or measuring a diffuse field on or in the component. A fault in the electrical component is detected based on the measured diffuse-field. An alternating field may be generated at a potential-carrying part of the component. The diffuse-field element comprises a pair of electrodes (51,71). A number of elements are provide to allow spatially-resolved measurement. An Independent claim is included for a method of testing a component.
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申请公布号 |
DE10240143(A1) |
申请公布日期 |
2004.03.25 |
申请号 |
DE20021040143 |
申请日期 |
2002.08.30 |
申请人 |
SIEMENS AG |
发明人 |
NAUNDORF, JOERG;SCHIMETTA, GERNOT;ZELLNER, MAX |
分类号 |
G01R31/28;G01R31/312;(IPC1-7):G01R31/312;G01R31/26;H01L21/66;H01L21/768 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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