| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device reduced in size without increasing the amount of deionized water or a chemical used. SOLUTION: The cleaning device 1 cleans a substrate 17 with a gas or a cleaning fluid, is provided with a stage 5 on the main surface of which the substrate 17 is capable of being mounted; a large cup 7 having an opening and is capable of forming a sealed cleaning tub 6 in the inside by stopping the opening with the main surface; a small cup 9 having an opening and being capable of forming an entrance 31 of a gas discharge/water discharge space 15 between the margin of the opening and the main surface of the stage 5; and a cleaning unit 3 capable of feeding the gas and the cleaning fluid into the small cup 9, and is constructed so that the gas and the cleaning fluid fed into the tub 6 may be discharged from the tub 6 through the space 15 between the large cup 7 and the small cup 9. COPYRIGHT: (C)2004,JPO
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