PROCESSING DEVICE, AND PROCESSING DEVICE MAINTENANCE METHOD

摘要

An electrode temperature adjusting device for a processing device that makes it possible to reduce the installation space and to achieve energy saving, and to prevent global warming, without using PFC as a refrigerant for a refrigerating circuit. An electrode temperature adjusting device for a processing device (100) is characterized by comprising a refrigerating circuit (110) that consists of a compressor (148), a condenser (142), an expansion valve (150), and an evaporator (108), with the evaporator being disposed within a lower electrode (106). There is no need to provide such components as a refrigerating tank for storing a refrigerant, a pump for delivering a refrigerant to the processing device, a heater for temperature adjustment of the refrigerant, and a heat exchanger for heat exchange between the primary and secondary refrigerants. For this reason, it is possible to attain cost reduction, reduction of installation space due to size reduction of the device, and energy saving. Further, using CO2 as a refrigerant ensures that the GWP is about 1/8000 - 1/7000 of that for chlorofluorocarbon.