Capacitive pressure sensor has its dimensions optimized using an iterative numerical method so that errors caused by tensioning forces and temperature hysteresis are minimized

摘要

Capacitive pressure sensor has a pressure measurement cell with a cylindrical base body with a first diameter and a first thickness, a measurement membrane of the front surface of the base body with a second diameter and thickness, an elastic sealing ring with third diameter and thickness and a support ring with fourth diameter and thickness. The pressure measurement cell is clamped between the sealing ring and the support ring using a clamping ring. The dimensions of the components are such that axial tensioning and radial deformation of the measurement cell are minimized. An Independent claim is made for a method for iterative optimization of the dimensions of a support ring and a decoupling element for the pressure sensor based on use of finite element techniques.