SHAPE MEASURING DEVICE AND SHAPE MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To perform highly-accurate shape measuring capable of reducing a probe diameter correction error or an installation deviation error caused by centering deficiency. SOLUTION: This shape measuring device is constituted so as to measure a w-surface shape by allowing the tip of a probe 24 to follow the measuring surface 20a of a measuring object 20. In addition, the measuring device is equipped with a preliminary coordinate change quantity calculation part 41 for calculating a preliminary coordinate change quantity for reducing an error caused by the centering deficiency and the installation deviation of the measuring object 20, a preliminary coordinate change processing part 42 for changing coordinates of measured data by the preliminary coordinate change quantity calculated by the preliminary coordinate change quantity calculation part 41, and an alignment processing part 43 for determining the shape error of the measuring object 20 based on the measured data whose coordinates are changed by the preliminary coordinate changing part 42 and design data inputted beforehand. COPYRIGHT: (C)2004,JPO