发明名称 |
Whetstone pellet, whetstone, processes for producing them, process for producing optical element using whetstone, and process for producing exposure apparatus |
摘要 |
A whetstone pellet 1 is composed of a columnar base body 2 to be fixed on a pedestal 9, and an abrasive grain part 5 containing numerous abrasive grains formed by electroless plating on an end surface 3 of the base body 2. Upon forming the abrasive grain part 5, a plated layer is formed on the end surface 3 of the base body 2 under stirring a plating solution containing abrasive grains, whereby the distribution of the abrasive grains in the abrasive grain part 5 can be uniformized,
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申请公布号 |
US2004058062(A1) |
申请公布日期 |
2004.03.25 |
申请号 |
US20030618706 |
申请日期 |
2003.07.15 |
申请人 |
MASUKO MASAMI |
发明人 |
MASUKO MASAMI |
分类号 |
B24B13/01;B24B13/02;B24D7/06;B24D7/18;(IPC1-7):B05D5/06;B05D1/18 |
主分类号 |
B24B13/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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