发明名称 SOI MOS TRANSISTOR AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: An SOI(Silicon On Insulator) MOS transistor and a method for manufacturing the same are provided to minimize floating body effect by constantly maintaining body potential. CONSTITUTION: A gate insulating layer(18) and a gate electrode(20) are formed on an SOI substrate. A source/drain(28) is formed in the substrate to align the gate electrode. A silicide layer(30) is formed on the surface of the gate electrode and the source/drain. Schottky diode is connected between the source and the surface of the substrate, thereby constantly maintaining body potential.
申请公布号 KR20040025070(A) 申请公布日期 2004.03.24
申请号 KR20020056880 申请日期 2002.09.18
申请人 ANAM SEMICONDUCTOR., LTD. 发明人 JUNG, JIN HYO
分类号 H01L29/78;(IPC1-7):H01L29/78 主分类号 H01L29/78
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