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发明名称
MICRODEPOSITION APPARATUS
摘要
申请公布号
EP1399267(A1)
申请公布日期
2004.03.24
申请号
EP20020739639
申请日期
2002.05.31
申请人
LITREX CORPORATION
发明人
EDWARDS, CHARLES, O.;ALBERTALLI, DAVID;MIDDLETON, JAMES;BRUNER, SCOTT R.;BIELICH, HOWARD, WALTER;GRATCHEV, OLEG
分类号
B05D1/26;B05C5/00;B05C9/12;B05C9/14;B05C11/00;B05C11/10;B05D3/00;B25B11/00;B29C67/00;B41J2/01;B41J2/04;B41J2/045;B41J2/05;B41J2/055;B41J3/407;B41J3/54;H01L21/00;H01L21/683;H01L23/12;H01L51/50;H05B33/10;H05K1/02;H05K3/06;H05K3/12;H05K13/04;(IPC1-7):B05C11/10
主分类号
B05D1/26
代理机构
代理人
主权项
地址
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