摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic green sheet with a metal thin film in which the metal thin film is not damaged when a base film is peeled, a ceramic power dispersion layer is uniformly formed, and the metal thin films are formed in a precise pattern, and to provide a manufacturing method of the sheet and the manufacturing method of a ceramic capacitor. SOLUTION: A resin layer 3 is formed on the base film 2. Mask films 5 are arranged on the resin layer 3 in a prescribed pattern so as to thermally weld them. The metal thin films 4 in a pattern opposite to the mask film 5 are formed on a surface of the exposed resin layer 3 by a vacuum film creating method. The mask films 5 are peeled and the ceramic power dispersion layer 6 is formed on the resin layer comprising the metal thin films 4. Then, the ceramic green sheet with metal thin film 1 is obtained. The ceramic green sheets with metal thin films 1 are sequentially laminated and baked while the base films 2 are peeled. Consequently, a multilayer ceramic capacitor 11 is manufactured. COPYRIGHT: (C)2004,JPO
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