| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement measuring apparatus capable of precisely measuring a displacement and a slope of an object to be measured and make it small in size at a low cost. SOLUTION: In the apparatus, a laser beam is emitted from a laser source 11 under an output control by a control means 3, and the emitted beam passes through a beam splitter 12, reaches a collimator lens 13 by which the beam is converted into approximately parallel light, passes through a half mirror 14 and an objective lens 15 and is projected on a work W that is a plate-like opaque body. If the emitted beam from the laser light source 11 is projected on the work W, reflected light passes through the objective lens 15 and is separated into passing light and reflecting light in the half mirror 14. Then, the reflecting light reflected by the half mirror passes through a conical lens 18 and is received by a CCD 4 that is an imaging means. The conical lens 18 is arranged so that the light passes from the flat surface toward the cone curved surface and so that the image location of the light is on the image surface of the CCD 4. COPYRIGHT: (C)2004,JPO
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