摘要 |
<P>PROBLEM TO BE SOLVED: To provide a process for preparing an aluminum nitride sintered compact which inhibits occurrence of irregular color and achieves a high purity through few hr of baking. <P>SOLUTION: A molded, degreased or calcined product essentially comprising aluminum nitride is baked at 1,200-1,700°C while introducing a gas containing an ammonium gas and subsequently baked at 1,800-2,000°C in a nitrogen gas atmosphere. <P>COPYRIGHT: (C)2004,JPO |