| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hot isotropic pressurization device capable of uniformly mixing led-in treatment gas in a treatment chamber in the case of using mixed gas as the treatment gas and sampling the uniformly mixed gas to make an accurate composition analysis. <P>SOLUTION: In this hot isotropic pressurization device, two or more kinds of gas are separately supplied into a high pressure container 4 and mixed, and while regulating the partial pressure of each component of the mixed gas based on the result of sampling and analyzing the obtained mixed gas, a treated object 10 disposed in the high pressure container 4 is pressurized in an isotropic manner under high temperature by the mixed gas of high temperature and high pressure. A flow straightening cylinder 9 is disposed between the high pressure container 4 and the treated object 10. Opening parts 23, 38 of supply pipelines 22, 37 of each gas are arranged below in the high pressure container 4, on the inner peripheral surface side, and an agitating fan 14 is arranged below in the high pressure container 4, on the center side. An opening part 46 of a sampling pipeline 43 of the mixed gas is disposed near the agitating fan 14. <P>COPYRIGHT: (C)2004,JPO |
