发明名称 Semiconductor device and method of manufacturing the same
摘要 The present invention relates to a semiconductor device including a circuit composed of thin film transistors having a novel GOLD (Gate-Overlapped LDD (Lightly Doped Drain)) structure. The thin film transistor comprises a first gate electrode and a second electrode being in contact with the first gate electrode and a gate insulating film. Further, the LDD is formed by using the first gate electrode as a mask, and source and drain regions are formed by using the second gate electrode as the mask. Then, the LDD overlapping with the second gate electrode is formed. This structure provides the thin film transistor with high reliability.
申请公布号 US2004051142(A1) 申请公布日期 2004.03.18
申请号 US20030640939 申请日期 2003.08.14
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;ADACHI HIROKI
分类号 H01L21/336;H01L21/77;H01L21/84;H01L29/423;H01L29/786;(IPC1-7):H01L27/01 主分类号 H01L21/336
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