发明名称 Method of and apparatus for use in orienting an object at a reference angle
摘要 An apparatus for use in orienting an object at a reference angle includes a pin gauge having at least two projections located at an end of the body of the apparatus. The projections are located at certain X Y coordinates of an X, Y Z Cartesian coordinate system. A horizontal support supports the body so as to be movable horizontally in the longitudinal direction of the projections. A mechanical drive member is operable to move the body mechanically in the horizontal direction. The apparatus may also include a vertical support and vertical drive member. The pin gauge is mechanically moved into contact with a surface of an object to provide a reference angle for the object. Then the object is pivoted, if necessary, to bring the surface into point contact with all of the projections of the pin gauge, whereupon the object is oriented at the reference angle. Process errors in aligning the object using the reference angle are reduced because the orienting of the object at the reference angle is accomplished using mechanical elements.
申请公布号 US6705020(B2) 申请公布日期 2004.03.16
申请号 US20020140074 申请日期 2002.05.08
申请人 SAMSUNG ELECTRONICS CO, LTD. 发明人 KEUM GYEONG-SU;HONG HYUNG-SIK;YANG YUN-SIK;AN GUM-CHAN;YOUN HAE-KEUN;JUNG BYOUNG-SIK;CHOI KI-CHEOL
分类号 H01L21/68;(IPC1-7):G01B5/25 主分类号 H01L21/68
代理机构 代理人
主权项
地址